TY  - JOUR
A1  - Gerke, Sebastian
A1  - Hahn, Giso
A1  - Job, Reinhart
A1  - Terheiden, Barbara
T1  - Bias-plasma for RF magnetron sputter deposition of passivating amorphous silicon layers
T2  - Energy Procedia
Y1  - 2015
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/7164
VL  - 77
SP  - 75
EP  - 82
ER  -