TY  - CHAP
A1  - Jelinek, Moriz
A1  - Johannes, G.
A1  - Laven, Naveen
A1  - Ganagona, Goud
A1  - Job, Reinhart
A1  - Schustereder, Werner
A1  - Schulze, Hans-Joachim
A1  - Rommel, Matthias
A1  - Frey, Lothar
T1  - Metastable Defects in Proton Implanted and Annealed Silicon
T2  - P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015)
Y1  - 2016
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/7014
SN  - 978-3-03835-608-0
SP  - 169
EP  - 174
PB  - Trans Tech Publications Ltd.
CY  - Zürich
ER  -