TY  - CHAP
A1  - Jelinek, Moriz
A1  - Johannes, G.
A1  - Laven, Reinhart
A1  - Job, Werner
A1  - Schustereder, Hans-Joachim
A1  - Schulze, Mathias
A1  - Rommel, Lothar
T1  - A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime
T2  - E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions 64(11)
Y1  - 2014
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/6034
SP  - 199
EP  - 208
ER  -