TY  - CHAP
A1  - Jelinek, Moriz
A1  - Johannes, G.
A1  - Laven, Mathias
A1  - Rommel, Werner
A1  - Schustereder, Hans-Joachim
A1  - Schulze, Lother
A1  - Frey, Reinhart
T1  - Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon
T2  - E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazuré (Editors): High Purity Silicon XIII, ECS Transactions <u>64</u>(11)
Y1  - 2014
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/6033
SP  - 173
EP  - 185
ER  -