TY  - JOUR
A1  - Johannes, G.
A1  - Laven, Reinhart
A1  - Job, Hans
A1  - Schulze, -Joachim
A1  - Niedernostheide, Franz-Josef
A1  - Schustereder, Werner
A1  - Frey, Lothar
T1  - Activation and Dissociation of Proton-Induced Donor Profiles in Silicon
T2  - ECS Journal of Solid State Science and Technology
Y1  - 2013
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/5323
VL  - 2
IS  - 9
SP  - 389
EP  - 394
ER  -