TY  - JOUR
A1  - Schreiber-Prillwitz, Wolfgang
A1  - Job, Reinhart
T1  - Pressure Sensor Systems for Wide Pressure Ranges Integrated by a Combined CMOS- and MEMS-Technology
T2  - Journal of Integrated Circuits and Systems
Y1  - 2013
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/5322
VL  - 8
IS  - 2
SP  - 83
EP  - 88
ER  -