TY  - CHAP
A1  - Kirnstötter, Stefan
A1  - Faccinelli, Martin
A1  - Hadley, Peter
A1  - Job, Reinhart
A1  - Schustereder, Werner
A1  - Johannes, G.
A1  - Laven, Hans-Joachim
T1  - Imaging Superjunctions in CoolMOS™ Devices using Electron Beam Induced Current
T2  - G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1)
Y1  - 2012
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/4701
SP  - 475
EP  - 481
ER  -