TY  - CHAP
A1  - Schreiber-Prillwitz, Wofgang
A1  - Job, Reinhart
T1  - Improvement of Integrated Pressure Sensor Systems Fabricated by a Combined CMOS- and MEMS-Technology with regard to Low Pressure Ranges
T2  - G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1)
Y1  - 2012
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/4700
SP  - 417
EP  - 424
ER  -