TY  - CHAP
A1  - Kirnstötter, Stefan
A1  - Faccinelli, Martin
A1  - Hadley, Peter
A1  - Job, Reinhart
A1  - Schustereder, Werner
A1  - Johannes, G.
A1  - Laven, Hans-Joachim
T1  - Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC
T2  - E. Simoen, C. L. Claeys, P. Stallhofer, R. Falster, C. Mazuré (Editors): High Purity Silicon 12, ECS Transactions <u>50</u>(5)
Y1  - 2012
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/4699
SP  - 115
EP  - 120
ER  -