TY  - JOUR
A1  - Kazasidis, Orestis
A1  - Verpoort, Sven
A1  - Wittrock, Ulrich
T1  - Sensor for dynamic focus control of a deformable mirror
T2  - Appl. Opt.
N2  - We recently presented a novel unimorph deformable mirror which allows for dynamic focus shift with an actuation rate of 2 kHz. Such mirrors suffer from hysteresis and creep. Therefore, they have to be operated in closed-loop. For this purpose, we developed a defocus sensor based on an astigmatic detection system. In this paper, we present the sensor design and discuss its performance.
KW  - deformable mirrors
KW  - diode lasers
KW  - laser beams
KW  - laser machining
KW  - sensor performance
Y1  - 2020
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/12380
UR  - https://www.osapublishing.org/ao/abstract.cfm?uri=ao-59-18-5625
IS  - 59
SP  - 5625
EP  - 5630
ER  -