TY  - JOUR
A1  - Verpoort, Sven
A1  - Bittner, Matthias
A1  - Wittrock, Ulrich
T1  - Fast focus-shifter based on a unimorph deformable mirror
T2  - Applied Optics
N2  - On-the-fly remote laser processing plays an increasingly important role in modern fabrication techniques. These processes require guiding of the focus of a laser beam along the contours of the workpiece in three dimensions.
State-of-the-art galvanometer scanners already provide highly dynamic and precise transverse x−y beam steering. However, longitudinal focus shifting (“z-shifting”) relying on conventional optics is restricted to a bandwidth of a few hundred Hz. We have developed and manufactured a fast piezo-based z-shifting mirror with diffraction-limited surface fidelity providing a focus shift of 1z> 60 mm with an actuation rate of 2 kHz.
KW  - beam steering
KW  - deformable mirrors
KW  - optical components
KW  - laser machining
KW  - laser materials processing
Y1  - 2020
UR  - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/12357
UR  - https://www.osapublishing.org/ao/abstract.cfm?uri=ao-59-23-6959
SN  - 1559-128X
VL  - 59
IS  - 23
SP  - 6959
EP  - 6965
ER  -