@incollection{SchreiberPrillwitzJob2016, author = {Wolfgang Schreiber-Prillwitz and Reinhart Job}, title = {Development process for MEMS pressure sensors for standarized CMOS read-out circuitry}, booktitle = {29th Symposium on Integrated Circuits and Systems Design (SBCCI), IEEE Conference Publications}, doi = {10.1109/SBCCI.2016.7724037}, year = {2016}, }