@article{GerkeHahnJobetal.2015,
  author    = {Sebastian Gerke and Giso Hahn and Reinhart Job and Barbara Terheiden},
  title     = {Bias-plasma for RF magnetron sputter deposition of passivating amorphous silicon layers},
  journal   = {Energy Procedia},
  volume    = {77},
  pages     = {75 -- 82},
  doi       = {10.1016/j.egypro.2015.12.302},
  year      = {2015},
}