@article{GerkeBeckerRogallaetal.2016,
  author    = {Sebastian Gerke and H.-W. Becker and D. Rogalla and F. Singer and N. Brinkmann and S Fritz and Adnan Hammud and P. Keller and D. Skorka and D. Sommer and C. Weiß and S. Flege and Giso Hahn and Reinhard Job and Barbara Terheiden},
  title     = {Influence of post hydrogenation upon electrical, optical and structural properties of hydrogen less sputter deposited amorphous silicon},
  journal   = {Thin Solid Films},
  volume    = {598},
  pages     = {161 -- 169},
  doi       = {10.1016/j.tsf.2015.11.063},
  year      = {2016},
}