@incollection{JelinekJohannesLavenetal.2016,
  author    = {Moriz Jelinek and G. Johannes and Naveen Laven and Goud Ganagona and Reinhart Job and Werner Schustereder and Hans-Joachim Schulze and Matthias Rommel and Lothar Frey},
  title     = {Metastable Defects in Proton Implanted and Annealed Silicon},
  booktitle = {P. Pichler (Editor): Gettering and Defect Engineering in Semiconductor Technology XVI (GADEST 2015)},
  isbn      = {978-3-03835-608-0},
  year      = {2016},
}