@incollection{JelinekJohannesLavenetal.2014,
  author    = {Moriz Jelinek and G. Johannes and Reinhart Laven and Werner Job and Hans-Joachim Schustereder and Mathias Schulze and Lothar Rommel},
  title     = {A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime},
  booktitle = {E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazur{\´e} (Editors): High Purity Silicon XIII, ECS Transactions 64(11)},
  year      = {2014},
}