@incollection{JelinekJohannesLavenetal.2014,
  author    = {Moriz Jelinek and G. Johannes and Mathias Laven and Werner Rommel and Hans-Joachim Schustereder and Lother Schulze and Reinhart Frey},
  title     = {Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon},
  booktitle = {E. Simoen, C. Claeys, O. Kakatsuka, R. Falster, C. Mazur{\´e} (Editors): High Purity Silicon XIII, ECS Transactions <u>64</u>(11)},
  year      = {2014},
}