@article{SchreiberPrillwitzJob2013,
  author    = {Wolfgang Schreiber-Prillwitz and Reinhart Job},
  title     = {Pressure Sensor Systems for Wide Pressure Ranges Integrated by a Combined CMOS- and MEMS-Technology},
  journal   = {Journal of Integrated Circuits and Systems},
  volume    = {8},
  number    = {2},
  pages     = {83 -- 88},
  year      = {2013},
}