@incollection{SchreiberPrillwitzJob2012,
  author    = {Wofgang Schreiber-Prillwitz and Reinhart Job},
  title     = {Improvement of Integrated Pressure Sensor Systems Fabricated by a Combined CMOS- and MEMS-Technology with regard to Low Pressure Ranges},
  booktitle = {G. Wirth, N. Morimoto, D. Vasileska (Editors): Microelectronics Technology and Devices - SBMicro 2012, ECS Transactions <u>49</u>(1)},
  year      = {2012},
}