@incollection{KirnstoetterFaccinelliHadleyetal.2012,
  author    = {Stefan Kirnst{\"o}tter and Martin Faccinelli and Peter Hadley and Reinhart Job and Werner Schustereder and G. Johannes and Hans-Joachim Laven},
  title     = {Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC},
  booktitle = {E. Simoen, C. L. Claeys, P. Stallhofer, R. Falster, C. Mazur{\´e} (Editors): High Purity Silicon 12, ECS Transactions <u>50</u>(5)},
  year      = {2012},
}