@incollection{SchreiberPrillwitzSaukoskiChmieletal.2011,
  author    = {Wofgang Schreiber-Prillwitz and Mikko Saukoski and Gerhard Chmiel and Reinhart Job},
  title     = {Development of a Robust Design for Wet Etched Cointegrated Pressure Sensor Systems},
  booktitle = {F. W. DelRio, C. Eberl, M. P. de Boer, E. P. Guesev (Editors): Microelectromechanical Systems - Materials and Devices IV, MRS Symposium Proceedings Series Vol. 1299},
  year      = {2011},
}