TY - CHAP A1 - Johannes, G. A1 - Laven, Reinhart A1 - Job, Hans-Joachim A1 - Schulze, Franz-Josef A1 - Niedernostheide, Werner A1 - Schustereder, Lothar T1 - The Thermal Budget of Hydrogen-related Donor Profiles: Diffusion-limited Activation and Thermal Dissociation T2 - E. Simoen, C. L. Claeys, P. Stallhofer, R. Falster, C. Mazuré (Editors): High Purity Silicon 12, ECS Transactions 50(5) Y1 - 2012 UR - https://www.hb.fh-muenster.de/opus4/frontdoor/index/index/docId/4698 SP - 161 EP - 175 ER -